 FabVisionTM Solar is an integrated software solution is designed to help photovoltaic (PV) cell manufacturers improve production yield and profitability by allowing manufacturers to react more quickly to metrology and defectivity excursions. FabVision Solar leverages KLA-Tencor’s ICOS® PVI-6 data through a wide range of advanced analysis and monitoring features to provide better control and improve visibility into the manufacturing process.
FabVision Solar includes:
- Excursion/process monitoring (statistical process control): provides process control through in-line monitoring of all PVI-6 measurement parameters and alarms/email notifications on excursions
- Automated report generation: increases visibility into manufacturing process with time-based automated reporting analysis of optical inspection measurement results from multiple inspection modules across multiple fab manufacturing lines.
- Detection of repeating defects and warning capabilities: enables quick reaction to excursions with configurable rules set by proximity, defect type and frequency of occurrence; and real-time alarms for email notification and on-tool warning
- Defect signature identification using multiple wafer/cell stacking: provides means to visualize defect signatures or frequently impacted wafer/cell locations for root cause understanding and action in the production line
- Eased problem identification through wafer/cell image review: captures wafer/cell images and data from the PVI-6 and allows complete review of images complemented by eased navigation through data
FabVision Solar is a turn-key, integrated solution for PV cell manufacturing that complements customers’ existing automated optical inspection strategies. With FabVision Solar, users can identify the root cause of defectivity issues by applying production-proven defectivity and metrology methodologies from the integrated circuit (IC) and wafer markets that are designed specifically for ICOS PVI-6 tools and optimized for the solar industry.
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