High Brightness LED (“HB-LED”) usage is increasing for new applications as manufacturing costs decrease and performance improves. Applications such as mobile phone LCD screens and keypads and flashlights for camera phones have been the drivers for market growth in the last couple of years, as well as car headlights, LCD TV backlights and traffic signaling. HB-LED’s typically are used for high-end applications, making quality control imperative. Our ICOS wafer inspector offers outgoing automated visual inspection of HB-LED wafers for quality of the wafer surface.

LED Wafer Inspection

• ICOS WI-2220: High sensitivity inspection of critical LED wafer defects with low cost of ownership to support cost per lumen goals
• ICOS WI-22xx Series: Automated optical inspection and metrology of microelectronic devices on a variety of wafer substrates, surface inspection, and 2D bump inspection

Defect Inspection
MOCVD Process Control

• Candela 8620: Enabling improved substrate surface metrology and epi process control with high sensitivity to yield-limiting defects
• Candela CSxx: Defect inspection and classification systems for compound semiconductor and optoelectronic materials

Data Management and Analysis

• KLARITY LED: Automated LED wafer defect analysis of inspection results for LED yield enhancement

Surface Metrology
Stylus Profiling

• P-Series: Benchtop stylus profilers for production applications