UPGRADE CATALOG



 

Welcome to KLA-Tencor's Service Upgrade Center where you can browse and download information on various available upgrades, options and features that KLA-Tencor offers on our legacy tools.

KLA-Tencor's Service upgrades are one of the ways KLA-Tencor can help our customers reach the full productivity and performance on their legacy tools. These upgrades long with our service expertise to install them offer improved performance, new capability or added function to your legacy tool.

Upgrade Catalog

Tool	Tool Model	Title	Contact	Product Overview
ADE	WaferCheck, UltraGage and UltraScan	ASC2K Upgrade more information
Description This upgrade increases the productivity of the tool and user, extends the life of the tool and offers additional capability (Autoloader Fine Teach, Connection to Infotools) Tool Productivity
All	All	USB External Back-up Option for tools on NT OS more information
Description This upgrades adds USB capability, provides additional storage capability, improves time to recovery of the tool after hard drive crash through full image back-up of the hard-drive Tool Productivity Customer Productivity
Amray	18xx, 19xx and 3xxx	Productivity Enhancement Upgrades; PC, WINXP OS, S/W, new optional capability more information
Description This upgrade increases the productivity of the tool and user, expends the life of the tool, updates the operating system to Windows XP Value Category Tool Productivity Customer Productivity Software
BF	2135, 2138XP, 2139 and XPMMED	Productivity Enhancement and Capability Upgrade; WIN NT OS and Software version 5.4 more information
Description This upgrade increases the productivity of the tool and user, updates the operating system to Windows NT, and offers additional optional capability (defective pixel information, allow 2 Digit Mask plus factory automation capability) Tool Productivity Customer Productivity Software
CD-SEM	8100E & 8100XP	Centering and Blanking Aperture Upgrade more information
Description This upgrade improves measurement accuracy and repeatability through improved spot size and depth of focus New Capability / Feature
CD-SEM	8100E, 8100ER, 8100ET, 8100XP, 8100XPT, 81ooXPR	Productivity Enhancement Upgrades; upgrade from MAC to WINXP OS more information
Description This is a major productivity enhancement that upgrades the tool from the MAC to WINXP operating system, it extends the life of the tool due to obsolete parts, is includes faster PC, new video card and new features and capabilities. Tool Recovery Customer Productivity Software
CD-SEM	8250, 8450, ECD1, ECD2, ECD2 T	Productivity Enhancement Upgrades; upgrade from NT to WINXP OS more information
Description This is a productivity enhancement that upgrades the tool from the NT to WINXP operating system, it extends the life of the tool due to obsolete parts, it includes faster PC, new video card and new features and capabilities. Tool Productivity Customer Productivity Software
CD-SEM	8100E, 8100R, 8100S, 8100T	Advanced Central Recipe and Data Management Server more information
Description This is a server offers a centralized data source, data protection and an alternative data backup. Customer Productivity
Film	ASET-F5, ASET-F5x, SpectraFx 100 and SpectraFx 200	Thermal Curtain Upgrade more information
Description Thermal Curtain upgrade improves tool availability (uptime) after a down-event by maintaining the tool internal temperature, therefore, less time is needed to stabilize the tool after it is opened. Tool Recovery
Film	ASET-F5, ASET-F5x, SpectraFx 100 and SpectraFx 200	Productivity Enhancement Upgrades more information
Description This upgrade increases the productivity of the tool and user, improves cycle time, expends the life of the tool, updates the pattern recognition system Tool Productivity Customer Productivity Software
Optical Metrology	Archer XT and Archer AIM	Productivity Enhancement and Capability Upgrade; PC, WINXP OS, S/W more information
Description This upgrade increases the productivity of the tool and user, expends the life of the tool, updates the operating system to Windows XP, and offers additional optional capability (Automation, Image enhancement, MPX support, and much more) Tool Productivity Customer Productivity Software
Optical Metrology	Archer 5, Archer 10, Archer 10XT, Archer XT PLUS, Archer AIM, Archer eAIMPLUS, Archer 100, Archer 200	Z Stage Sensor more information
Description Z Stage Safety Sensor upgrade provides an improved sensor that decreases the likelihood of a hard-down event due to a Z stage sensor trip. This type of down-event may require a fix that will keep the tool down for 2-3 weeks. The new sensor will only require a soft-boot of the system. Tool Recovery
Profiler	P10, P11, P1 2 & P15	Productivity Enhancement Upgrades; PC, WINXP OS, S/W, new optional capability more information
Description This upgrade increases the productivity of the tool and user, expends the life of the tool, updates the operating system to Windows XP, and offers additional optional capability (sequencing, 2D stress, 3D scan, 200mm Long Scan) Tool Productivity Customer Productivity
UV Film	UV1xxx	Productivity Enhancement Upgrades; PC, Software version 2.62.06, pattern recognition systems and new capability more information
Description This upgrade increases the productivity (cycle time) of the tool and user, expends the life of the tool, updates the pattern recognition system and upgrades to software version 2.62.06 Tool Productivity Customer Productivity Software

Comprehensive Upgrade List

Tool	Tool Model	Title	Contact Us
All	Majority of K-T Legacy Tools	Factory Automation, GEM/SECS, Semi Standards - E4, E5, E30, E37, Advanced Semi Standard - E87, E39, E40, E90, E94, Overhead Track - E84 & hardware, Barcode & RFID readers, Light tower more information
Description New Capability / Feature Customer Productivity
All	Majority of K-T Legacy Tools	NT USB External Backup Option (NUEBO) more information
Description Customer Productivity
ADE	WaferCheck, UltraGage, & UltraScan	ASC2K Controller (PC) more information
Description Tool Productivity Customer Productivity Tool Recovery
ADE	UltraScan 8300	EMI Res Gauge more information
Description New Capability / Feature
ADE	WaferCheck, UltraGage & UltraScan: 7200, 8300, 9300, 9500, 9600, 9800	ADE Non-Contact Type Gage more information
Description New Capability / Feature
ADE	CR8X	Remote PC Interface (RCI) more information
Description New Capability / Feature
ADE	9xxx	9xxx E+ to E++ more information
Description Tool Productivity
ADE	9xxx	9xxx E+ to E++ Software - New ASC2K Controller for SW version below 10.10L more information
Description Tool Productivity Customer Productivity
Amray	Amray	Enhanced PC, WinXP more information
Description Tool Productivity Customer Productivity
Brightfield	2351, 2360, 2365, 2366, 2367, 2371	Offline Simulator more information
Description New Capability / Feature
Brightfield	2351, 2360, 2365, 2366, 2367, 2371, 9000	NFS option more information
Description New Capability / Feature
Brightfield	21xx	Software version 5.4.010 more information
Description New Capability / Feature
Brightfield	21xx	Software version 5.4.010 more information
Description New Capability / Feature
Brightfield	2135, 2138, 2138XP	DOS to NT, ADC more information
Description New Capability / Feature
CDSEM	8100XP	Low Particle Count Pre-Aligner more information
Description New Capability / Feature
CDSEM	8100XP	Remote Analysis Station, 10 Base T more information
Description New Capability / Feature
CDSEM	8100XP	NT Recipe and Data Server, 10 Base T more information
Description New Capability / Feature
CDSEM	8250, 8450	Windows Remote Workstation and Productivity s/w pack more information
Description New Capability / Feature
CDSEM	8250, 8450	Advanced Central Recipe and Data Server more information
Description New Capability / Feature
CDSEM	8xxx	Silicon Strip Aperture more information
Description New Capability / Feature
CDSEM	8100XP, 8300	Quick Pump Retrofit more information
Description New Capability / Feature
CDSEM	8100XP	CBA Retrofit Kit more information
Description New Capability / Feature
CDSEM	8100XP	SMC Retrofit Kit more information
Description New Capability / Feature
CDSEM	8100XP	SMC Retrofit Kit more information
Description New Capability / Feature
CDSEM	8100XP	ACE Retrofit Kit more information
Description New Capability / Feature
CDSEM	8100x	Mac to WinXP & NT to WinXP more information
Description Tool Productivity Customer Productivity
Darkfield	AIT 2,3	Software version 5.3.20.7 more information
Description New Capability / Feature
Darkfield	AIT XUV	Software version V6.3.89, AIT XUV Win2K more information
Description New Capability / Feature
Darkfield	AIT UV	Software version V6.3.89, AIT UV Win2K more information
Description New Capability / Feature
Darkfield	AIT UV++	Software version v6.3.89, AIT UV++ Win2K more information
Description New Capability / Feature
Darkfield	AIT XUV	Software version V6.3.89, AIT XUV WinNT more information
Description New Capability / Feature
Darkfield	AIT UV	Software version V6.3.89, \AIT UV WinNT more information
Description New Capability / Feature
Darkfield	AIT UV	Software version V6.3.89, AIT UV WinNT more information
Description New Capability / Feature
Darkfield	AIT XP+	Software version V6.3.89, AIT XP+, WinNT more information
Description New Capability / Feature
Darkfield	AIT UV+	Software version V6.3.89, AIT UV+ WinNT more information
Description New Capability / Feature
Darkfield	AIT2, AIT3, AIT XP, AITXP+	RTC Package more information
Description New Capability / Feature
Darkfield	AIT UV	Upgrade to Spot 2.2,3.5,6um more information
Description New Capability / Feature
Darkfield	AIT2	AIT2 TO FUSION,200mm chuck upgrade more information
Description New Capability / Feature
EBEAM	eCD1, eCD1T	Remote Workstation more information
Description New Capability / Feature
EBEAM	eCD1, eCD1T	Advanced Central Recipe and Data Management Package (server) more information
Description New Capability / Feature
EBEAM	eCD2, eCD2T	Remote workstation more information
Description New Capability / Feature
EBEAM	eCD2, eCD2T	Central recipe & data server more information
Description New Capability / Feature
Film	RS35, RS55, RS75, RS100	Software; Strattrax & WINXP more information
Description New Capability / Feature
Film	UV-1xxx	Software version 2.6.2 more information
Description New Capability / Feature
Film	UV-1xxx	Enhanced PC (850 MHz , Matrox & Cognex Cards, WIN-NT) more information
Description Tool Productivity Customer Productivity
Film	UV1250, UV1280SE, UV1050, UV1080	Horizontal Lamp Upgrade more information
Description Improved lamp longevity and uptime
Film	ASET-F5x	2D Stress more information
Description New Capability / Feature
Film	ASET-F5X, SpectraFx-100/200	Software version, Summit v.4.9 more information
Description New Capability / Feature
Film	ASET-F5 & ASET-F5x	Enhanced PC more information
Description Tool Productivity Customer Productivity
Film	ASET-F5, ASET-F5x, SpectraFX	Thermal Curtain more information
Description Tool Recovery
Film	Aset-F5x	ASET-F5x DVD kit more information
Description New Capability / Feature
MIE	INS3000, INS3300	XP Controller (PC) more information
Description Tool Productivity Customer Productivity Tool Recoverye
Optical CD	SCD100/200, F5X-SCD	Software version Summit v 4.9 more information
Description New Capability / Feature
Optical Metrology	5100, 5105, 5107, 5200	KLASS4 Stepper Analysis Software (for non-XP systems) more information
Description New Capability / Feature
Optical Metrology	5100, 5105, 5107, 5200	KLASS PSF ANALYSIS (VMS) Shift Focus (PSF) Analysis for non-XP more information
Description New Capability / Feature
Optical Metrology	5100, 5105, 5107, 5200, 5200XP, 5107XP, 5100XP, 5105XP	KLASS Phase Shift Focus (PSF) Analysis Windows Stand Alone more information
Description New Capability / Feature
Optical Metrology	5100, 5105, 5107, 5200	KLASS Analysis Combo (KLASS4 + PSF) for non-XP more information
Description New Capability / Feature
Optical Metrology	5200XP, 5107XP, 5100XP, 5105XP	KLASS Phase Shift Focus (PSF) Analysis for XP System Kit more information
Description New Capability / Feature
Optical Metrology	5200XP, 5107XP, 5100XP, 5105XP	KLASS ANALYSIS COMBO -XP KLASS4.0+PSF more information
Description New Capability / Feature
Optical Metrology	All	XP SOFTWARE LICENSES more information
Description New Capability / Feature
Optical Metrology	5100, 5105, 5107, 5200, 5200XP, 5107XP, 5100XP, 5105XP	Stand Alone KLASS 4.0 for Windows more information
Description New Capability / Feature
Optical Metrology	5107	2DCD Measurement Software for Non-XP more information
Description New Capability / Feature
Optical Metrology	5107, 5107XP	Apex (Take-Off) Angle Measurement more information
Description New Capability / Feature
Optical Metrology	5100, 5105, 5107, 5200, 5200XP, 5107XP, 5100XP, 5105XP	Non-Contact Height Measurement more information
Description New Capability / Feature
Optical Metrology	5100, 5105, 5107, 5200, 5200XP, 5107XP, 5100XP, 5105XP	CPM Overlay Measurement Software more information
Description New Capability / Feature
Optical Metrology	5100, 5105, 5107, 5200, 5200XP, 5107XP, 5100XP, 5105XP	SMP/CD Measurement Option for Overlay FOV more information
Description New Capability / Feature
Optical Metrology	5107	Advanced CD Measurement Package more information
Description New Capability / Feature
Optical Metrology	5107, 5107XP	Advanced Overlay Measurement Package more information
Description New Capability / Feature
Optical Metrology	5107	Multi-CD Measurement more information
Description New Capability / Feature
Optical Metrology	5107, 5107XP	Slanted Line Measurement more information
Description New Capability / Feature
Optical Metrology	5200XP, 5107XP, 5100XP, 5105XP	RDM Machine Client Software and License more information
Description New Capability / Feature
Optical Metrology	5200XP, 5107XP, 5100XP, 5105XP	RDM Remote PC Client Software and License more information
Description New Capability / Feature
Optical Metrology	5200XP, 5107XP, 5100XP, 5105XP	KLASS4 Stepper Analysis Software for XP more information
Description New Capability / Feature
Optical Metrology	5200XP, 5107XP, 5100XP, 5105XP	RS1 Remote Client more information
Description New Capability / Feature
Optical Metrology	5107XP	2DCD Measurement Software for XP more information
Description New Capability / Feature
Optical Metrology	5107, 5107XP	Multi-Edge CD Measurement more information
Description New Capability / Feature
Optical Metrology	Archer 10XT, Archer 10, Archer AIM, Archer 5	RS1 Remote Client Software more information
Description New Capability / Feature
Optical Metrology	Archer 10XT, Archer 10, Archer AIM, Archer 5v	CMP Measurement (CPM+ANRA) more information
Description New Capability / Feature
Optical Metrology	Archer 10XT, Archer 10, Archer AIM, Archer 5	CPM Overlay Measurement SW more information
Description New Capability / Feature
Optical Metrology	Archer 10XT, Archer 10, Archer AIM, Archer 5	ANRA Overlay Measurement SW more information
Description New Capability / Feature
Optical Metrology	Archer 10XT, Archer 10, Archer AIM, Archer 5	BFCD - Bright Field CD more information
Description New Capability / Feature
Optical Metrology	Archer 10XT, Archer 10, Archer AIM, Archer 5	SMP-Stepper Measurement Process more information
Description New Capability / Feature
Optical Metrology	Archer 10XT, Archer 10, Archer AIM, Archer 5	Multi layer & XY separation more information
Description New Capability / Feature
Optical Metrology	Archer All	RDM server upgrade (includes Dell 2900 server and RDM 6.3 and one tool client) more information
Description New Capability / Feature
Optical Metrology	Archer All	RDM additional tool client upgrade from 3.3 to 6.3 more information
Description New Capability / Feature
Optical Metrology	5xxx All	RDM SW to v3.3.2 (Tool Client) more information
Description New Capability / Feature
Optical Metrology	5xxx All	RDM SW to v3.3.2 (Tool Client) more information
Description New Capability / Feature
Optical Metrology	ArcherXT	Software version 5.5 more information
Description New Capability / Feature
Optical Metrology	ArcherAIM	Software version 5.5 more information
Description New Capability / Feature
Optical Metrology	Archer 5/10	Software version 3.1 more information
Description New Capability / Feature
Optical Metrology	53xx	Software version 15.32 more information
Description New Capability / Feature
Optical Metrology	51xx/ 52xx	Software version 14.7 more information
Description New Capability / Feature
Optical Metrology	5100, 5105, 5107, 5200, 5200XP, 5107XP, 5100XP, 5105XP	Reflective Chuck Kit, 200mm more information
Description New Capability / Feature
Optical Metrology	5100, 5105, 5107, 5200	Ethernet Network Connection Hardware (for 10baseT, BNC, and AUI connectors) more information
Description New Capability / Feature
Optical Metrology	UV1050	Upgrade to UV1080 (Optical only) more information
Description Enhance Performance
Optical Metrology	Archer	200 Reflect Host Chuck RDM more information
Description New Capability / Feature
Optical Metrology	Archer 10XT, Archer AIM	WIN XP + PC Enhancement (SW 3.3 to SW5.5) more information
Description Tool Productivity Customer Productivity
Optical Metrology	Archer 10XT, Archer AIM	WIN XP + PC Enhancement (SW 3.3 to SW5.5) more information
Description Tool Productivity Customer Productivity
Optical Metrology	Archer 10, 5, AIM, 10XT, XT PLUS, Archer 100, 200, eAIMPLUS	Z Stage Safety Sensor KIT Schneeberger Stage more information
Description New Capability / Feature
Profiler	P10, P11, P12, P15 without Pat Rec	Profiler WIN XP + PC Enhancement more information
Description Tool Productivity Customer Productivity
Profiler	P10, P11, P12, P15	Profiler WIN XP + PC Enhancement Options, LONG SCAN 200 MM, 2D stress w/ locator, 3D Scan, Sequencing, Offline Simulator 7.0 more information
Description Tool Productivity Customer Productivity
Profiler	Profiler offline software V6.41	Profiler WIN XP + PC Enhancement Options, LONG SCAN 200 MM, 2D stress w/ locator, 3D Scan, Sequencing, Offline Simulator 7.0 more information
Description Feature and Capability
Profiler	HRP75, HRP100	Pattern Recognition more information
Description Tool Productivity New Capability / Feature
Profiler	HRP75, HRP100	Off-line software v4.X more information
Description Feature and Capability
Profiler	HRP220, HRP320	Off-line software v5.X more information
Description Feature and Capability
RAPID	RAPID 3xx, SL3xx	Reticle Transfer Station with 5in and 6in frame adapters more information
Description New Capability / Feature
RAPID	RAPID 3xx, SL3xx	Remote System Reset more information
Description New Capability / Feature
RAPID	RAPID 3xx, SL3xx	200MHz SPARC20 (Upgrade from 75MHz SPARC20) more information
Description New Capability / Feature
RAPID	RAPID 3xx, 4xx	Mask Adaptor, Perkin-Elmer, 7.25 round more information
Description New Capability / Feature
Surfscan	SFS 6XXX	Software 4.2 with or without CPU more information
Description New Capability / Feature
Surfscan	SFS 6XXX	NFS Chameleon Network,V.4.x more information
Description New Capability / Feature
Surfscan	SFS 6220	MS Network interface, WIN98 V. 4.2 more information
Description New Capability / Feature
Surfscan	SP1	NT USB External Backup Option (NUEBO) on front panel & XP USB External Backup Option (NUEBO) on front panel more information
Description Customer Productivity
Surfscan	SP1 TBI, DLS	SP1 MX4.1 option RSF Mask Mini-D-Open more information
Description New Capability / Feature
Surfscan	SP1 TBI, DLS	SP1 MX4.2 options, Haze Package, SP1 MX4.2 Option E116, Recipe Checker, Desktop software, Enhanced Edge Exclusion Option, Haze Normalization & Haze Analysis, BF sizing more information
Description New Capability / Feature
ThermaWave	OP2xxx, OP3xxx	Software version 3.3B28 more information
Description New Capability / Feature
ThermaWave	OP5000 or older	Software version V4.3.1.2, IRACE more information
Description New Capability / Feature
ThermaWave	OP5000 or older	GO software version V1.2 more information
Description New Capability / Feature Tool Productivity
ThermaWave	OP52xx	NT to XP PC upgrade more information
Description Tool Productivity Customer Productivity

If you would like more information on an upgrade or if you do not see an upgrade, option or feature listed here that may be of interest to you please contact your local service center or e-mail us at service.upgrade@kla-tencor.com