KLA-Tencor’s SensArray SensorWafers provide a unique way, not available from conventional process monitoring equipment, to monitor the effect of the process environment on production wafers. Measurements, such as temperature and RF voltage, are used by both chipmakers and process monitoring equipment manufacturers to visualize, diagnose, and control their processes and process tools.

Lithography

• ScannerTemp: allows highly accurate temperature monitoring of dry and immersion lithography systems, whose overlay performance is highly sensitive to thermal variation.
• SensArray 1840 Rev A: Instrumented wafers for real-time hot plate temperature measurements
• SensArray 1850: Instrumented wafers for bake plate characterization
• BakeTemp: Wireless SensorWafer for in-situ temperature monitoring of resist track bake plates
• Integrated Wafer: Wireless, low profile wafer system for gathering critical thermal data from semiconductor manufacturing processes
• Base Station 300/300Z: Central operating hub for process monitoring and uploading thermal measurement survey requirements and downloading thermal survey data
• iWafer Carrier Station: Communication link between the SensorWafer and host computer
• LithoSuite: Data collection and analysis system for lithography applications
• MaskTemp: Wireless plate to confirm the post-process is under control prior to sending plate to the post develop track and etch
• SmartFOUP and SmartBox: Deployment platforms with fully sealed on-board diagnostics systems
• Thermal MAP: Wireless data acquisition hardware and graphical software for visualization and analysis
• Thermal TRACK: PC-based PDA supplies real-time process measurements

Plasma Etch

• EtchTemp-SE (ET-SE) delivers temperature wafer monitoring during silicon etch processes, providing precise condition temperature measurements with a higher signal-to-noise ratio than alternative methods.
• APTI Wafers and APTI Buttons: In situ process monitoring tools for measuring and profiling peak temperature across the wafer or chamber
• EtchTemp: Instrumented SensorWafer for characterizing high-power, high-frequency etch recipes for 65nm nodes and below
• I3 Integral: SensorWafer for highly accurate measurement of plasma etch temperature
• iWafer Carrier Station: Communication link between SensorWafer and host computer
• PlasmaSuite: Data collection and analysis system for plasma applications
• PlasmaTemp: Instrumented SensorWafer for collecting time-sequenced temperature data
• PlasmaVolt X2: Instrumented SensorWafer for direct measurements of plasma voltage at the wafer surface
• SmartFOUP and SmartBox: Deployment platforms with fully sealed on-board diagnostics systems

Implant and Wet

• WetTemp-LP is designed to be compatible with both single wafer and batch wet clean systems that require this standard-thickness wafer form factor.
• i3 Integral for Implant: Capture process environment effects on production wafers and obtain accurate temperature profiles with full wafer spatial resolution monitoring
• I3 Integral for Wet: Instrumented wafer designed to provide critical wet processing temperature data
• PlasmaSuite: Data collection and analysis system for plasma applications
• Base Station 300/300Z: Central operating hub for process monitoring and uploading thermal measurement survey requirements and downloading thermal survey data
• iWafer Carrier Station: Communication link between the SensorWafer and host computer

Instrumented Substrates

• SensArray 1530: Instrumented wafer for cold wall, RTP, sputtering, CVD, plasma strippers and epitaxial reactors
• SensArray 1535: Instrumented wafer for process temperature monitoring of hot wall systems, and oxidizing cold wall environments
• SensArray 1630: Instrumented wafer for both front-end atmospheric and belt CVD systems, and in back-end wafer solder bumping reflow ovens
• SensArray 1730: Instrumented wafer for photoresist track systems, temperature-controlled wafer chuck systems, oven applications, and resist bake, polyimide, and SOG applications
• SensArray 20x0: Instrumented glass panels and tiles for measuring temperature profiles for a range of flat panel processing applications
• Thermal MAP: Wireless data acquisition hardware and graphical software for visualization and analysis
• Thermal TRACK: PC-based PDA supplies real-time process monitoring and measurements